FRONT TCO(Transparent conductive oxides)
MF Rotary Sputtering of Cylindrical Target
Future expandable for higher throughput
Fast Deposition and short Tact time
Easier maintenance and operation
 
     
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System Highlights    
Modular and flexible configuration to meet different production requirements
Side by side substrate conveying to avoid deposition on chamber and wheels
Far-infrared heating modules for fast and effective heating of substrates
Rotational target achieves high target utilization
Deposition of TCO layers on one pass
No substrate holding carrier design to reduce heat capacity