FRONT TCO(Transparent conductive oxides)
- MF Rotary Sputtering of Cylindrical Target
- Future expandable for higher throughput
- Fast Deposition and short Tact time
- Easier maintenance and operation
BACK CONTACT
System Highlights
- Modular and flexible configuration to meet different production requirements
- Side by side substrate conveying to avoid deposition on chamber and wheels
- Far-infrared heating modules for fast and effective heating of substrates
- Rotational target achieves high target utilization
- Deposition of TCO layers on one pass
- No substrate holding carrier design to reduce heat capacity
