Outstanding Features:
DVDR/ CDR Switchable
High production capacity and process flexibility
Close loop climate control
Automatic air-flow regulation
One touch machine setup
Excellent TE/FE control
Built-In Climate Control Unit
Integrate with Unaxis SWIVEL 2003 or Anwell TM Sputtering System

Specifications:
Handling Cycle Time: DVDR: 1.5 sec

CDR: 1.5sec

Yield: > 90%
Dimension: L6255W4030H1900
Weight: ~ 5 Tons (without IMM )

SPECIAL FEATURES / SPECIFICATIONTECHNICAL DATA / FOOTPRINTBROCHURESMART IN MOTION